Acton的准分子激光反射窗片镀的膜很坚固,采用电子束沉积电介质设计,可的减少反射。
准分子激光-窄带宽抗反射窗片
Wavelength | 1" Part Number | 2” Part Number | % Reflectance N.I. |
126nm | M126-2AR-1D-FL | M126-2AR-2D-FL | ≤ 0.5% @ 126nm |
147nm | M147-2AR-1D-FL | M147-2AR-2D-FL | ≤ 0.5% @ 147nm |
157nm | M157-2AR-1D-FL | M157-2AR-2D-FL | ≤ 0.5% @ 157nm |
172nm | M172-2AR-1D-FL | M172-2AR-2D-FL | ≤ 0.3-0.5% @ 172nm |
193nm | M193-2AR-1D-FL | M193-2AR-2D-FL | ≤ 0.3-0.5% @193nm |
248nm | M248-2AR-1D-FL | M248-2AR-2D-FL | ≤ 0.2-0.5% @248nm |
308nm | M308-2AR-1D-FL | M308-2AR-2D-FL | ≤ 0.2-0.5% @308nm |
353nm | M353-2AR-1D-FL | M353-2AR-2D-FL | ≤ 0.2-0.5% @353nm |